physics.optics · 2026-07-29 · No. 68

Optics, 2026-07-29.

1 new papers in physics.optics. Titles, authors, abstracts. Links to arXiv. Want this in your inbox every morning? Subscribe →

01 — The papers

1 entries
  1. 01

    Physics-Informed Neural Operator for Warm-Starting Background-Decomposed and Preconditioned PSFD: Enabling Scalable 3-D EUV Mask Simulation

    Doyun Kim, Werner Gillijns

    physics.optics · cs.AI · cs.LG · physics.app-ph

    We present a physics-informed neural operator (PINO) trained with pseudo-spectral frequency-domain (PSFD) equations for electromagnetic (EM) scattering problems in EUV lithography. The Fourier neural operator is factorized into a two-dimensional lateral ($xy$) branch and a one-dimensional axial ($z$) branch and is trained self-consistently with background decomposition.Thus, the full-vector coupling between the mask and the multilayer...

    arxiv.org/abs/2607.25330 · PDF

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