physics.optics · 2026-09-11 · No. 112

Optics, 2026-09-11.

1 new papers in physics.optics. Titles, authors, abstracts. Links to arXiv. Want this in your inbox every morning? Subscribe →

01 — The papers

1 entries
  1. 01

    A Two-Mirror Faceted Projection System for EUV Lithography

    Vasiliy A. Es'kin, Egor V. Ivanov, Olga V. Martynova

    physics.optics · cs.LG · physics.app-ph · physics.class-ph · physics.comp-ph

    We propose an all-reflective two-mirror projection system for extreme ultraviolet (EUV) lithography operating at exposure wavelengths of $13.5$~nm (Mo/Si) and $11.2$~nm (Ru/Be), delivering a fourfold ($4\times$) demagnification of the periodic mask pattern at a numerical aperture approaching unity ($\mathrm{NA}_{\max} \approx 0.993$). In contrast to conventional EUV projection objectives that incorporate 6--10 aspheric mirrors with an overall...

    arxiv.org/abs/2609.11299 · PDF

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